特征：                                                             应用：

行程4m x 4m                                              半导体设备

以线性滑轨或空气轴承架构之定位平台                   自动化搬送

良好接地设计防止杂讯干扰                                  FPD设备

Z向震动可达奈米等级以下                                   太阳能製造设备

速度可达5m/s                                             PCB设备

标准重现精度1um或以下                                     水刀设备

位置回馈系统解析度可达50nm 。                   鑽石切割产业
                                                                      AOI检测设备
                                                                      工具机